SELECTION OF METHOD FOR ESTIMATING THE INHOMOGENEITY OF LARGE-DIAMETER INDUSTRIAL SILICON-CRYSTALS

被引：0
|
作者：
YUROVA, ES
SHVEDOVA, OI
KANEVSKAYA, VM
TARASOV, VK
机构：
来源：
INDUSTRIAL LABORATORY | 1990年 / 56卷 / 10期
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暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
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页码：1192 / 1194
页数：3
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