首页
学术期刊
论文检测
AIGC检测
热点
更多
数据
SILICON EPITAXIAL-GROWTH BY RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION
被引:25
|
作者
:
LEE, SK
论文数:
0
引用数:
0
h-index:
0
LEE, SK
KU, YH
论文数:
0
引用数:
0
h-index:
0
KU, YH
KWONG, DL
论文数:
0
引用数:
0
h-index:
0
KWONG, DL
机构
:
来源
:
APPLIED PHYSICS LETTERS
|
1989年
/ 54卷
/ 18期
关键词
:
D O I
:
10.1063/1.101288
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:1775 / 1777
页数:3
相关论文
共 50 条
[1]
SILICON EPITAXIAL-GROWTH ON SILICON-ON-INSULATOR STRUCTURES BY RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION
HSIEH, TY
论文数:
0
引用数:
0
h-index:
0
HSIEH, TY
JUNG, KH
论文数:
0
引用数:
0
h-index:
0
JUNG, KH
KWONG, DL
论文数:
0
引用数:
0
h-index:
0
KWONG, DL
APPLIED PHYSICS LETTERS,
1990,
57
(23)
: 2425
-
2427
[2]
THE RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION OF SILICON EPITAXIAL-FILMS
JUNG, KH
论文数:
0
引用数:
0
h-index:
0
机构:
University of Texas, Austin
JUNG, KH
HSIEH, TY
论文数:
0
引用数:
0
h-index:
0
机构:
University of Texas, Austin
HSIEH, TY
KWONG, DL
论文数:
0
引用数:
0
h-index:
0
机构:
University of Texas, Austin
KWONG, DL
JOM-JOURNAL OF THE MINERALS METALS & MATERIALS SOCIETY,
1991,
43
(10):
: 38
-
43
[3]
SELECTIVE EPITAXIAL-GROWTH WITH OXIDE-POLYCRYSTALLINE SILICON-OXIDE MASKS BY RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION
HSIEH, TY
论文数:
0
引用数:
0
h-index:
0
机构:
TEXAS INSTRUMENTS INC,DALLAS,TX 75265
TEXAS INSTRUMENTS INC,DALLAS,TX 75265
HSIEH, TY
JUNG, KH
论文数:
0
引用数:
0
h-index:
0
机构:
TEXAS INSTRUMENTS INC,DALLAS,TX 75265
TEXAS INSTRUMENTS INC,DALLAS,TX 75265
JUNG, KH
KWONG, DL
论文数:
0
引用数:
0
h-index:
0
机构:
TEXAS INSTRUMENTS INC,DALLAS,TX 75265
TEXAS INSTRUMENTS INC,DALLAS,TX 75265
KWONG, DL
SPRATT, DB
论文数:
0
引用数:
0
h-index:
0
机构:
TEXAS INSTRUMENTS INC,DALLAS,TX 75265
TEXAS INSTRUMENTS INC,DALLAS,TX 75265
SPRATT, DB
APPLIED PHYSICS LETTERS,
1990,
57
(09)
: 872
-
874
[4]
DOPANT-ENHANCED LOW-TEMPERATURE EPITAXIAL-GROWTH OF INSITU DOPED SILICON BY RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION
HSIEH, TY
论文数:
0
引用数:
0
h-index:
0
HSIEH, TY
JUNG, KH
论文数:
0
引用数:
0
h-index:
0
JUNG, KH
KIM, YM
论文数:
0
引用数:
0
h-index:
0
KIM, YM
KWONG, DL
论文数:
0
引用数:
0
h-index:
0
KWONG, DL
APPLIED PHYSICS LETTERS,
1991,
58
(01)
: 80
-
82
[5]
SILICON EPITAXIAL-GROWTH ON GAAS USING A RAPID THERMAL CHEMICAL VAPOR-DEPOSITION PROCESS
NISSIM, YI
论文数:
0
引用数:
0
h-index:
0
机构:
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
NISSIM, YI
SAPRIEL, J
论文数:
0
引用数:
0
h-index:
0
机构:
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
SAPRIEL, J
GAO, Y
论文数:
0
引用数:
0
h-index:
0
机构:
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
GAO, Y
DANTERROCHES, C
论文数:
0
引用数:
0
h-index:
0
机构:
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
DANTERROCHES, C
REGOLINI, JL
论文数:
0
引用数:
0
h-index:
0
机构:
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
REGOLINI, JL
BENSAHEL, D
论文数:
0
引用数:
0
h-index:
0
机构:
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
CTR NATL ETUD TELECOMMUN,CTR NATL SCI,FRANCE TELECOM,F-38243 MEYLAN,FRANCE
BENSAHEL, D
APPLIED PHYSICS LETTERS,
1991,
59
(06)
: 656
-
658
[6]
ROLE OF DOPANT INCORPORATION IN LOW-TEMPERATURE SI EPITAXIAL-GROWTH BY RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION
HSIEH, TY
论文数:
0
引用数:
0
h-index:
0
机构:
CHARLES EVANS & ASSOCIATES,REDWOOD CITY,CA 94063
HSIEH, TY
JUNG, KH
论文数:
0
引用数:
0
h-index:
0
机构:
CHARLES EVANS & ASSOCIATES,REDWOOD CITY,CA 94063
JUNG, KH
KWONG, DL
论文数:
0
引用数:
0
h-index:
0
机构:
CHARLES EVANS & ASSOCIATES,REDWOOD CITY,CA 94063
KWONG, DL
HITZMAN, CJ
论文数:
0
引用数:
0
h-index:
0
机构:
CHARLES EVANS & ASSOCIATES,REDWOOD CITY,CA 94063
HITZMAN, CJ
BRENNAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
CHARLES EVANS & ASSOCIATES,REDWOOD CITY,CA 94063
BRENNAN, R
IEEE TRANSACTIONS ON ELECTRON DEVICES,
1992,
39
(01)
: 203
-
205
[7]
EPITAXIAL-GROWTH OF GERMANIUM ON SILICON BY CHEMICAL VAPOR-DEPOSITION
GREEN, ML
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,MURRAY HILL,NJ 07974
AT&T BELL LABS,MURRAY HILL,NJ 07974
GREEN, ML
ALI, YS
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,MURRAY HILL,NJ 07974
AT&T BELL LABS,MURRAY HILL,NJ 07974
ALI, YS
BRASEN, D
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,MURRAY HILL,NJ 07974
AT&T BELL LABS,MURRAY HILL,NJ 07974
BRASEN, D
WILLENS, RH
论文数:
0
引用数:
0
h-index:
0
机构:
AT&T BELL LABS,MURRAY HILL,NJ 07974
AT&T BELL LABS,MURRAY HILL,NJ 07974
WILLENS, RH
JOURNAL OF ELECTRONIC MATERIALS,
1987,
16
(04)
: A28
-
A28
[8]
SILICON HOMOEPITAXY BY RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION (RTPCVD) - A REVIEW
HSIEH, TY
论文数:
0
引用数:
0
h-index:
0
机构:
INTEGRATED DEVICE TECHNOL INC, SANTA CLARA, CA 95052 USA
INTEGRATED DEVICE TECHNOL INC, SANTA CLARA, CA 95052 USA
HSIEH, TY
JUNG, KH
论文数:
0
引用数:
0
h-index:
0
机构:
INTEGRATED DEVICE TECHNOL INC, SANTA CLARA, CA 95052 USA
INTEGRATED DEVICE TECHNOL INC, SANTA CLARA, CA 95052 USA
JUNG, KH
KWONG, DL
论文数:
0
引用数:
0
h-index:
0
机构:
INTEGRATED DEVICE TECHNOL INC, SANTA CLARA, CA 95052 USA
INTEGRATED DEVICE TECHNOL INC, SANTA CLARA, CA 95052 USA
KWONG, DL
LEE, SK
论文数:
0
引用数:
0
h-index:
0
机构:
INTEGRATED DEVICE TECHNOL INC, SANTA CLARA, CA 95052 USA
INTEGRATED DEVICE TECHNOL INC, SANTA CLARA, CA 95052 USA
LEE, SK
JOURNAL OF THE ELECTROCHEMICAL SOCIETY,
1991,
138
(04)
: 1188
-
1207
[9]
SELECTIVE DEPOSITION OF INSITU DOPED POLYCRYSTALLINE SILICON BY RAPID THERMAL-PROCESSING CHEMICAL VAPOR-DEPOSITION
HSIEH, TY
论文数:
0
引用数:
0
h-index:
0
HSIEH, TY
CHUN, HG
论文数:
0
引用数:
0
h-index:
0
CHUN, HG
KWONG, DL
论文数:
0
引用数:
0
h-index:
0
KWONG, DL
APPLIED PHYSICS LETTERS,
1989,
55
(23)
: 2408
-
2410
[10]
SELECTIVE EPITAXIAL-GROWTH BY RAPID THERMAL-PROCESSING
LEE, SK
论文数:
0
引用数:
0
h-index:
0
LEE, SK
KU, YH
论文数:
0
引用数:
0
h-index:
0
KU, YH
HSIEH, TY
论文数:
0
引用数:
0
h-index:
0
HSIEH, TY
JUNG, K
论文数:
0
引用数:
0
h-index:
0
JUNG, K
KWONG, DL
论文数:
0
引用数:
0
h-index:
0
KWONG, DL
APPLIED PHYSICS LETTERS,
1990,
57
(03)
: 273
-
275
←
1
2
3
4
5
→