ELLIPSOMETRIC ANALYSIS OF REFRACTIVE-INDEX PROFILES PRODUCED BY ION-IMPLANTATION IN SILICA GLASS

被引:23
|
作者
BAYLY, AR [1 ]
TOWNSEND, PD [1 ]
机构
[1] UNIV SUSSEX,SCH MATH & PHYS SCI,BRIGHTON BN1 9QH,SUSSEX,ENGLAND
关键词
D O I
10.1088/0022-3727/6/9/316
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1115 / 1128
页数:14
相关论文
共 50 条
  • [31] RECOIL PROFILES PRODUCED BY ION-IMPLANTATION THROUGH DIELECTRIC LAYERS
    BLUNT, RT
    SWEDA, R
    SANDERS, IR
    VACUUM, 1984, 34 (1-2) : 281 - 284
  • [32] ELLIPSOMETRIC DETERMINATION OF THE THICKNESS AND REFRACTIVE-INDEX OF SILICON FILMS
    LI, M
    YAKOVLEV, VA
    WALL, J
    IRENE, EA
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1993, 11 (06): : 2102 - 2106
  • [33] FORMATION OF CUCL ULTRAFINE PARTICLES IN SILICA GLASS BY ION-IMPLANTATION
    FUKUMI, K
    CHAYAHARA, A
    KITAMURA, N
    AKAI, T
    HAYAKAWA, J
    FUJII, K
    SATOU, M
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1994, 178 (pt 2) : 155 - 159
  • [34] FORMATION OF BURIED OXYNITRIDE LAYERS IN SILICA GLASS BY ION-IMPLANTATION
    OYOSHI, K
    TAGAMI, T
    TANAKA, S
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (07) : 3653 - 3660
  • [35] EFFECTS OF OH-GROUP ON DISTRIBUTION OF REFRACTIVE-INDEX IN SILICA GLASS
    YAMAGATA, S
    NIPPON SERAMIKKUSU KYOKAI GAKUJUTSU RONBUNSHI-JOURNAL OF THE CERAMIC SOCIETY OF JAPAN, 1992, 100 (03): : 337 - 341
  • [36] REFRACTIVE-INDEX PROFILES OF DOUBLE-SILVER-EXCHANGED GLASS SYSTEMS
    GONELLA, F
    QUARANTA, A
    JOURNAL OF MODERN OPTICS, 1994, 41 (01) : 1 - 4
  • [37] STRIPE WAVE-GUIDES WITH MATCHED REFRACTIVE-INDEX PROFILES FABRICATED BY ION-EXCHANGE IN GLASS
    POSZNER, T
    SCHREITER, G
    MULLER, R
    JOURNAL OF APPLIED PHYSICS, 1991, 70 (04) : 1966 - 1974
  • [38] ELLIPSOMETRIC ANALYSIS OF ION-IMPLANTATION INDUCED DAMAGE LAYER AND ITS REGROWTH
    NAKAMAE, M
    NOJIRI, M
    TAKAHATA, K
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1978, 125 (08) : C354 - C354
  • [39] REFRACTIVE INDEX CHANGES PRODUCED IN GLASS BY ION EXCHANGE
    FRENCH, WG
    PEARSON, AD
    AMERICAN CERAMIC SOCIETY BULLETIN, 1969, 48 (09): : 873 - &
  • [40] REFRACTIVE INDEX CHANGES PRODUCED IN GLASS BY ION EXCHANGE
    FRENCH, WG
    PEARSON, AD
    AMERICAN CERAMIC SOCIETY BULLETIN, 1970, 49 (11): : 974 - &