HYDROGENATION EFFECTS ON POLYSILICON THIN-FILM TRANSISTOR STRUCTURES

被引：0
|
作者：
HATALIS, MK [1 ]
KUNG, JH [1 ]
KANICKI, J [1 ]
机构：
[1] LEHIGH UNIV,DEPT ELECT ENGN & COMP SCI,BETHLEHEM,PA 18015
来源：
IEEE TRANSACTIONS ON ELECTRON DEVICES | 1992年 / 39卷 / 11期
关键词：
D O I：
10.1109/16.163533
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
[No abstract available]
引用
收藏
页码：2665 / 2665
页数：1
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