METALLIZATION FOR INTEGRATED-CIRCUIT MANUFACTURING

被引：1

作者：

JOSHI, RV

BLEWER, RS

MURARKA, S

机构：

[1] SANDIA NATL LABS,MICROELECTR DIRECTORATE,DEPT ADV SILICON PROGRAMS,LIVERMORE,CA 94550

[2] RENSSELAER POLYTECH INST,CTR INTEGRATED & ELECTR & ELECTR MFG,TROY,NY 12181

来源：

MRS BULLETIN | 1995年 / 20卷 / 11期

关键词：

D O I：

10.1557/S088376940004553X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：33 / 37

页数：5

共 50 条

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[2] GAAS INTEGRATED-CIRCUIT MANUFACTURING
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[J]. MRS BULLETIN, 1992, 17 (04) : 42 - 44
[3] CAPACITANCE MODELS FOR INTEGRATED-CIRCUIT METALLIZATION WIRES
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[5] ALUMINUM METALLIZATION CHARACTERIZATION FOR INTEGRATED-CIRCUIT APPLICATIONS
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[8] CORROSION RESISTANCE OF SEVERAL INTEGRATED-CIRCUIT METALLIZATION SYSTEMS
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