METALLIZATION FOR INTEGRATED-CIRCUIT MANUFACTURING

被引：1

作者：

JOSHI, RV

BLEWER, RS

MURARKA, S

机构：

[1] SANDIA NATL LABS,MICROELECTR DIRECTORATE,DEPT ADV SILICON PROGRAMS,LIVERMORE,CA 94550

[2] RENSSELAER POLYTECH INST,CTR INTEGRATED & ELECTR & ELECTR MFG,TROY,NY 12181

来源：

MRS BULLETIN | 1995年 / 20卷 / 11期

关键词：

D O I：

10.1557/S088376940004553X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：33 / 37

页数：5

共 50 条

[11] EFFECTS OF SELF-HEATING ON INTEGRATED-CIRCUIT METALLIZATION LIFETIMES
LIEW, BK
CHEUNG, NW
HU, C
[J]. 1989 INTERNATIONAL ELECTRON DEVICES MEETING, TECHNICAL DIGEST, 1989, : 323 - 326
[12] EFFECT OF INTEGRATED-CIRCUIT METALLIZATION LINEWIDTH ON THE DISTRIBUTION OF ELECTROMIGRATION LIFETIMES
DULNIAK, RJ
[J]. APPLIED PHYSICS LETTERS, 1989, 54 (13) : 1229 - 1231
[13] SPATIAL YIELD ANALYSIS IN INTEGRATED-CIRCUIT MANUFACTURING
MALLORY, CL
PERLOFF, DS
HASAN, TF
STANLEY, RM
[J]. SOLID STATE TECHNOLOGY, 1983, 26 (11) : 121 - 127
[14] IMPROVING THE PERFORMANCE OF AN INTEGRATED-CIRCUIT MANUFACTURING LINE
NEVE, JM
RAY, FD
SITARIK, JP
[J]. AT&T TECHNICAL JOURNAL, 1987, 66 (05): : 39 - 48
[15] MICROELECTRONIC TEST CHIPS IN INTEGRATED-CIRCUIT MANUFACTURING
PERLOFF, DS
MALLORY, CL
WAHL, FE
MYLROIE, SW
[J]. SOLID STATE TECHNOLOGY, 1981, 24 (09) : 75 - 80
[16] MATERIAL CONTROL AUTOMATION FOR INTEGRATED-CIRCUIT MANUFACTURING
BRAIN, M
PARIKH, M
BONORA, A
SWAMY, K
[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C449 - C449
[17] MODELING OF THE SILICON INTEGRATED-CIRCUIT DESIGN AND MANUFACTURING PROCESS
DUTTON, RW
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1983, 30 (09) : 968 - 986
[18] MODELING OF THE SILICON INTEGRATED-CIRCUIT DESIGN AND MANUFACTURING PROCESS
DUTTON, RW
[J]. SIAM JOURNAL ON SCIENTIFIC AND STATISTICAL COMPUTING, 1983, 4 (03): : 357 - 390
[19] THE USE AND EVALUATION OF YIELD MODELS IN INTEGRATED-CIRCUIT MANUFACTURING
CUNNINGHAM, JA
[J]. IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, 1990, 3 (02) : 60 - 71
[20] APPLICATION OF MANAGEMENT TOOLS FOR IMPROVING INTEGRATED-CIRCUIT MANUFACTURING
SANDERS, TJ
BOARMAN, JW
[J]. SOLID STATE TECHNOLOGY, 1987, 30 (05) : 105 - 110

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