METALLIZATION FOR INTEGRATED-CIRCUIT MANUFACTURING

被引：1

作者：

JOSHI, RV

BLEWER, RS

MURARKA, S

机构：

[1] SANDIA NATL LABS,MICROELECTR DIRECTORATE,DEPT ADV SILICON PROGRAMS,LIVERMORE,CA 94550

[2] RENSSELAER POLYTECH INST,CTR INTEGRATED & ELECTR & ELECTR MFG,TROY,NY 12181

来源：

MRS BULLETIN | 1995年 / 20卷 / 11期

关键词：

D O I：

10.1557/S088376940004553X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：33 / 37

页数：5

共 50 条

[21] AUTONOMOUS ROBOTIC VEHICLES APPLICATION IN INTEGRATED-CIRCUIT MANUFACTURING
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C326 - C326
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[J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (8B) : C476 - C476
[24] A COLOR-VISION INSPECTION SYSTEM FOR INTEGRATED-CIRCUIT MANUFACTURING
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[J]. THIN SOLID FILMS, 1992, 220 (1-2) : 1 - 7
[27] INTEGRATED-CIRCUIT RELIABILITY
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[J]. ELECTRONIC PRODUCTS MAGAZINE, 1983, 25 (10): : 51 - 55
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[J]. COMPUTER NETWORKS AND ISDN SYSTEMS, 1982, 6 (03): : 232 - 233
[29] INVENTION OF INTEGRATED-CIRCUIT
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[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1976, 23 (07) : 648 - 654
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[J]. ELECTRONICS AND POWER, 1984, 30 (04): : 279 - 281

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