Mechanical characterization by nanoindentation of implanted layers.

Mechanical characterization by nanoindentation of implanted layers. The indentation study of applied surface layers or modified layers used in most high technology devices have led to the development of a new range of mechanical microprobes with which the mechanical characterization tests by nanoindentation give a continuous record of the indentation and elastic recovery using a triangular-base pyramidal indenter. Application examples show that nanoindentation is a powerful means of investigation and allows us to well characterize the mechanical properties of implanted layers.