Mechanical characterization by nanoindentation of implanted layers.

被引：0

作者：

Boudoukha, L ^{[1
]}

Paletto, S ^{[1
]}

Fantozzi, G ^{[1
]}

机构：

[1] INSA,LAB GRP ETUD MET PHYS MAT,URA 341,F-69621 VILLEURBANNE,FRANCE

来源：

ANNALES DE CHIMIE-SCIENCE DES MATERIAUX | 1995年 / 20卷 / 7-8期

关键词：

D O I：

暂无

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Mechanical characterization by nanoindentation of implanted layers. The indentation study of applied surface layers or modified layers used in most high technology devices have led to the development of a new range of mechanical microprobes with which the mechanical characterization tests by nanoindentation give a continuous record of the indentation and elastic recovery using a triangular-base pyramidal indenter. Application examples show that nanoindentation is a powerful means of investigation and allows us to well characterize the mechanical properties of implanted layers.

引用

页码：411 / 414

页数：4

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