Evaluating mechanical properties of thin layers using nanoindentation and finite-element modeling: Implanted metals and deposited layers

被引：14
|
作者：
Knapp, JA
Follstaedt, DM
Barbour, JC
Myers, SM
Ager, JW
Monteiro, OR
Brown, IG
机构：
来源：
MATERIALS MODIFICATION AND SYNTHESIS BY ION BEAM PROCESSING | 1997年 / 438卷
关键词：
D O I：
10.1557/PROC-438-617
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We present a methodology based on finite-element modeling of nanoindentation data to extract reliable and accurate mechanical properties from thin, hard films and surface-modified layers on softer substrates. The method deduces the yield stress, Young's modulus, and hardness from indentations as deep as 50% of the layer thickness.
引用
收藏
页码：617 / 625
页数：9
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