MASS-SPECTROMETRIC STUDY OF NEUTRAL-SPUTTERED SPECIES IN AN RF GLOW-DISCHARGE SPUTTERING SYSTEM

被引：46

作者：

COBURN, JW ^{[1
]}

ECKSTEIN, EW ^{[1
]}

KAY, E ^{[1
]}

机构：

[1] IBM CORP,RES LAB,SAN JOSE,CA 95193

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1975年 / 12卷 / 01期

关键词：

D O I：

10.1116/1.568745

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：151 / 154

页数：4

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