PROPERTIES OF CADMIUM STANNATE THIN-FILMS PRODUCED BY REACTIVE HIGH-RATE DC MAGNETRON-PLASMATRON SPUTTERING

被引：11
|
作者：
SCHILLER, S [1 ]
BEISTER, G [1 ]
BUEDKE, E [1 ]
BECKER, HJ [1 ]
SCHICHT, H [1 ]
机构：
[1] VOLKSEIGENER BETRIEB FLACHGLASKOMBINAT,TORGAU,GER DEM REP
来源：
THIN SOLID FILMS | 1982年 / 96卷 / 02期
关键词：
D O I：
10.1016/0040-6090(82)90609-5
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：113 / 120
页数：8
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