INFLUENCE OF THE IMPACT ANGLE ON THE DEPTH RESOLUTION AND THE SENSITIVITY IN SIMS DEPTH PROFILING USING A CESIUM ION-BEAM

被引：34
|
作者：
WITTMAACK, K
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词：
D O I：
10.1116/1.572775
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
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页码：1350 / 1354
页数：5
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