A REVIEW OF SUBMICRON LITHOGRAPHY

被引：19
|
作者：
SMITH, HI
机构：
来源：
SUPERLATTICES AND MICROSTRUCTURES | 1986年 / 2卷 / 02期
关键词：
D O I：
10.1016/0749-6036(86)90077-7
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：129 / 142
页数：14
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