STRUCTURAL EFFECTS ON A SUB-MICRON TRENCH PROCESS

被引：63
|
作者：
CHIN, DJ
DHONG, SH
LONG, GJ
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 07期
关键词：
D O I：
10.1149/1.2114195
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：1705 / 1707
页数：3
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