VACUUM EQUIPMENT IN MICROELECTRONICS

被引：0

作者：

RIEGERT, RP

机构：

来源：

SEMICONDUCTOR PRODUCTS AND SOLID STATE TECHNOLOGY | 1965年 / 8卷 / 07期

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：17 / &

共 50 条

[31] PACKAGING AND COOLING PROBLEMS ASSOCIATED WITH MICROELECTRONICS EQUIPMENT
HONNOR, F
THOMAS, MA
[J]. MICROELECTRONICS RELIABILITY, 1969, 8 (04) : 331 - &
[32] Simulation of equipment design optimization in microelectronics manufacturing
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[J]. 30TH ANNUAL SIMULATION SYMPOSIUM, PROCEEDINGS, 1997, : 92 - 101
[33] Novel photocathodes using vacuum microelectronics technology
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Zakharchenko, Yu.F.
Torgashov, G.V.
[J]. Radiotekhnika, 1999, (04): : 8 - 17
[35] Surface-science aspects of vacuum microelectronics
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[J]. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 1995, 13 (04): : 1391 - 1410
[36] FIELD-EMITTER ARRAYS FOR VACUUM MICROELECTRONICS
SPINDT, CA
HOLLAND, CE
ROSENGREEN, A
BRODIE, I
[J]. IEEE TRANSACTIONS ON ELECTRON DEVICES, 1991, 38 (10) : 2355 - 2363
[37] SURFACE-SCIENCE ASPECTS OF VACUUM MICROELECTRONICS
SCHWOEBEL, PR
BRODIE, I
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (04): : 1391 - 1410
[38] VACUUM EQUIPMENT CAPABILITIES
不详
[J]. METALLURGIA, 1990, 57 (05): : 233 - 233
[39] EQUIPMENT FOR VACUUM PROCESSING
KUHL, W
[J]. CHEMIE INGENIEUR TECHNIK, 1973, 45 (23) : 1344 - 1348
[40] Vacuum drying equipment
不详
[J]. AGRO FOOD INDUSTRY HI-TECH, 1999, 10 (01): : 46 - 46

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