VACUUM EQUIPMENT IN MICROELECTRONICS

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作者：

RIEGERT, RP

机构：

来源：

SEMICONDUCTOR PRODUCTS AND SOLID STATE TECHNOLOGY | 1965年 / 8卷 / 07期

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中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

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页码：17 / &

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