Surface-science aspects of vacuum microelectronics

被引：0
|
作者：
Schwoebel, P.R. [1 ]
Brodie, I. [1 ]
机构：
[1] SRI Int, Menlo Park, United States
来源：
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures | 1995年 / 13卷 / 04期
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页码：1391 / 1410
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