PRODUCTION OF SILICON SINGLE-CRYSTALS AND WAFERS

被引：0
|
作者：
ABE, Y
机构：
来源：
DENKI KAGAKU | 1986年 / 54卷 / 08期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：662 / 666
页数：5
相关论文
共 50 条
  • [31] POINT-DEFECT RELAXATION IN SILICON SINGLE-CRYSTALS
    GADAUD, P
    WOIRGARD, J
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 1989, 110 : L1 - L4
  • [32] THE ORIGIN OF IRON INTERSTITIAL IN QUENCHED SILICON SINGLE-CRYSTALS
    STOJIC, M
    PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 1982, 70 (01): : K39 - K42
  • [33] ELLIPSOMETRIC STUDIES OF SILICON-CARBIDE SINGLE-CRYSTALS
    TAIROV, YM
    TSVETKOV, VF
    LAUKHE, Y
    FIZIKA TVERDOGO TELA, 1977, 19 (12): : 3653 - 3656
  • [34] IMPREGNATION WITH HEAVY-IONS IN SILICON SINGLE-CRYSTALS
    KISELEVICH, M
    LYATUSHINSKI, A
    ZHUK, V
    OSIPENKO, BP
    FIZIKA TVERDOGO TELA, 1975, 17 (04): : 1080 - 1084
  • [35] STANDARD ORIENTATION SPECIMENS BASED ON SILICON SINGLE-CRYSTALS
    KHOLODNYI, LP
    TERENTEV, GI
    KROL, IM
    MEASUREMENT TECHNIQUES USSR, 1984, 27 (03): : 266 - 268
  • [36] MICROWAVE CONDUCTIVITY OF DISLOCATIONS IN DEFORMED SILICON SINGLE-CRYSTALS
    GLEITZ, A
    HELBERG, HW
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1985, 90 (02): : K209 - K213
  • [37] BRITTLE CRACK-PROPAGATION IN SILICON SINGLE-CRYSTALS
    BREDE, M
    HSIA, KJ
    ARGON, AS
    JOURNAL OF APPLIED PHYSICS, 1991, 70 (02) : 758 - 771
  • [38] GOLD-INDUCED DEFECTS IN SILICON SINGLE-CRYSTALS
    KANNAN, VC
    TSUNEKAW.Y
    INDIAN JOURNAL OF TECHNOLOGY, 1973, 11 (10): : 474 - 477
  • [39] GROWTH MECHANISMS OF SINGLE-CRYSTALS OF SILICON WITH AND WITHOUT DISLOCATIONS
    KAMARALI, VV
    MURAVITSKII, SA
    BUZUNOV, AI
    TIKHONOV, VP
    INORGANIC MATERIALS, 1977, 13 (01) : 5 - 8
  • [40] ELECTROCHEMICAL BEHAVIOR OF SILICON SINGLE-CRYSTALS IN CHLOROALUMINATE MELT
    TYAGAI, VA
    PANOV, EV
    DELIMARSKII, YK
    STEPANOVA, IA
    SHIRSHOV, YM
    SOVIET ELECTROCHEMISTRY, 1978, 14 (11): : 1453 - 1458
12345