PRODUCTION OF SILICON SINGLE-CRYSTALS AND WAFERS

被引:0
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作者
ABE, Y
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DENKI KAGAKU | 1986年 / 54卷 / 08期
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O646 [电化学、电解、磁化学];
学科分类号
081704 ;
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页码:662 / 666
页数:5
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