共 50 条
- [41] OPTICAL-WAVEGUIDES FABRICATED BY ION-IMPLANTATION [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1973, 10 (06): : 936 - 940
- [42] OPTICAL DOPING OF SILICON WITH ERBIUM BY ION-IMPLANTATION [J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 653 - 658
- [44] OPTICAL DETECTION OF BE ION-IMPLANTATION DAMAGE IN GAAS [J]. REPORT OF NRL PROGRESS, 1975, (MAR): : 21 - 24
- [45] ION-IMPLANTATION ASSOCIATED DEFECT PRODUCTION IN SILICON [J]. SOLID-STATE ELECTRONICS, 1983, 26 (06) : 539 - 548
- [47] ION SOURCES FOR ION-IMPLANTATION AND ION-BEAM MODIFICATION OF MATERIALS [J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (04): : 1284 - 1289
- [48] ION-IMPLANTATION - A MODERN TOOL TO PRODUCE METASTABLE SYSTEMS [J]. PHYSICA B & C, 1984, 127 (1-3): : 354 - 358