OPTICAL-WAVEGUIDES FABRICATED BY ION-IMPLANTATION

被引：15
|
作者：
NAMBA, S
ARITOME, H
NISHIMURA, T
MASUDA, K
TOYODA, K
机构：
[1] OSAKA UNIV, FAC ENGN SCI, TOYONAKA, OSAKA, JAPAN
[2] INST PHYS & CHEM RES, WAKO, SAITAMA, JAPAN
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期
关键词：
D O I：
10.1116/1.1318519
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：936 / 940
页数：5
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