EFFECT OF SUBSTRATE BIAS ON THE PROPERTIES OF MICROCRYSTALLINE SILICON FILMS DEPOSITED IN A GLOW-DISCHARGE

被引：32

作者：

SAROTT, FA ^{[1
]}

IQBAL, Z ^{[1
]}

VEPREK, S ^{[1
]}

机构：

[1] UNIV ZURICH,INST INORGAN CHEM,CH-8057 ZURICH,SWITZERLAND

来源：

SOLID STATE COMMUNICATIONS | 1982年 / 42卷 / 06期

关键词：

D O I：

10.1016/0038-1098(82)90974-7

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

引用

页码：465 / 468

页数：4

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