INSITU INVESTIGATION OF THE GROWTH OF RF GLOW-DISCHARGE DEPOSITED AMORPHOUS-GERMANIUM AND SILICON FILMS

被引：74
|
作者：
ANTOINE, AM
DREVILLON, B
CABARROCAS, PRI
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 07期
关键词：
D O I：
10.1063/1.337924
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：2501 / 2508
页数：8
相关论文
共 50 条
  • [1] ELECTRONIC-PROPERTIES OF DOPED GLOW-DISCHARGE AMORPHOUS-GERMANIUM
    HAUSCHILDT, D
    STUTZMANN, M
    STUKE, J
    DERSCH, H
    SOLAR ENERGY MATERIALS, 1982, 8 (1-3): : 319 - 330
  • [2] LUMINESCENCE IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON
    STREET, RA
    KNIGHTS, JC
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (03): : 248 - 248
  • [3] ELECTRON-SPIN RESONANCE OF DOPED GLOW-DISCHARGE AMORPHOUS-GERMANIUM
    STUTZMANN, M
    STUKE, J
    DERSCH, H
    PHYSICA STATUS SOLIDI B-BASIC RESEARCH, 1983, 115 (01): : 141 - 151
  • [4] HYDROGENATED AMORPHOUS-SILICON GERMANIUM ALLOYS PREPARED BY TRIODE RF GLOW-DISCHARGE
    ICHIMURA, T
    IHARA, T
    HAMA, T
    OHSAWA, M
    SAKAI, H
    UCHIDA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1986, 25 (04): : L276 - L278
  • [5] INSITU ELLIPSOMETRY STUDIES OF THE GROWTH OF HYDROGENATED AMORPHOUS-SILICON BY GLOW-DISCHARGE
    COLLINS, RW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03): : 514 - 517
  • [6] LUMINESCENCE DECAY IN GLOW-DISCHARGE DEPOSITED AMORPHOUS SILICON
    TSANG, C
    STREET, RA
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1978, 37 (05): : 601 - 608
  • [7] MICROCRYSTALLINE SILICON FILMS DEPOSITED BY CATHODE-TYPE RF GLOW-DISCHARGE TECHNIQUE
    JAYATISSA, AH
    NAKANISHI, Y
    HATANAKA, Y
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1995, 142 (05) : 1663 - 1666
  • [8] OBLIQUELY DEPOSITED AMORPHOUS-GERMANIUM FILMS
    ORLOWSKI, BA
    SPICER, WE
    BAER, AD
    THIN SOLID FILMS, 1976, 34 (01) : 31 - 34
  • [9] AC CONDUCTION IN GLOW-DISCHARGE AMORPHOUS SILICON FILMS
    NITTA, S
    SHIMAKAWA, K
    SAKAGUCHI, K
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1977, 24 (01) : 137 - 140
  • [10] HETEROGENEITIES AND SURFACE EFFECTS IN GLOW-DISCHARGE DEPOSITED HYDROGENATED AMORPHOUS-SILICON FILMS
    FRITZSCHE, H
    THIN SOLID FILMS, 1982, 90 (02) : 119 - 129
12345