EFFECT OF SUBSTRATE BIAS ON THE PROPERTIES OF MICROCRYSTALLINE SILICON FILMS DEPOSITED IN A GLOW-DISCHARGE

被引：32
|
作者：
SAROTT, FA [1 ]
IQBAL, Z [1 ]
VEPREK, S [1 ]
机构：
[1] UNIV ZURICH,INST INORGAN CHEM,CH-8057 ZURICH,SWITZERLAND
来源：
SOLID STATE COMMUNICATIONS | 1982年 / 42卷 / 06期
关键词：
D O I：
10.1016/0038-1098(82)90974-7
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：465 / 468
页数：4
相关论文
共 50 条
  • [21] EFFECT OF NITROGEN DOPING ON GLOW-DISCHARGE AMORPHOUS-SILICON FILMS
    PIETRUSZKO, SM
    NARASIMHAN, KL
    GUHA, S
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1981, 43 (02): : 357 - 363
  • [22] Optical and transport properties of amorphous and microcrystalline silicon films prepared by excimer laser assisted rf glow-discharge deposition
    Cabarrocas, PRI
    Layadi, N
    Kunst, M
    Clerc, C
    Bernas, H
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1998, 16 (02): : 436 - 443
  • [23] GAP STATES IN HYDROGENATED MICROCRYSTALLINE SILICON GROWN BY GLOW-DISCHARGE TECHNIQUE
    DUSANE, SR
    JOURNAL OF APPLIED PHYSICS, 1992, 72 (07) : 2923 - 2926
  • [24] SCHOTTKY BARRIERS FABRICATED ON GLOW-DISCHARGE A-SI-H FILMS DEPOSITED UNDER BIAS
    BORATYNSKI, BS
    JASKOLSKI, SV
    JOURNAL OF ELECTRONIC MATERIALS, 1983, 12 (06) : 947 - 958
  • [25] THE EFFECT OF GLOW-DISCHARGE CHARACTERISTICS ON THE PROPERTIES OF PLASMA-CVD SILICON-NITRIDE FILMS
    HIRAIWA, A
    MUKAI, K
    TAKAHASHI, S
    HARADA, S
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1981, 128 (03) : C104 - C105
  • [26] EFFECT OF TEMPERATURE ON OPTICAL-PROPERTIES OF GLOW-DISCHARGE HYDROGENATED AMORPHOUS-SILICON FILMS
    DONNADIEU, A
    YOUS, B
    BERGER, JM
    FERRATON, JP
    ROBIN, J
    JOURNAL DE PHYSIQUE, 1981, 42 (NC4): : 655 - 658
  • [27] RAMAN-STUDY ON THE SILICON NETWORK OF HYDROGENATED AMORPHOUS-SILICON FILMS DEPOSITED BY A GLOW-DISCHARGE
    HISHIKAWA, Y
    WATANABE, K
    TSUDA, S
    OHNISHI, M
    KUWANO, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1985, 24 (04): : 385 - 389
  • [28] ELECTRONIC PROPERTIES OF CRYSTALLIZED GLOW-DISCHARGE SILICON
    REILLY, OJ
    SPEAR, WE
    PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1978, 38 (03): : 295 - 302
  • [29] AC CONDUCTION IN GLOW-DISCHARGE AMORPHOUS SILICON FILMS
    NITTA, S
    SHIMAKAWA, K
    SAKAGUCHI, K
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1977, 24 (01) : 137 - 140
  • [30] CATHODOLUMINESCENCE OF DIAMOND-LIKE FILMS DEPOSITED BY GLOW-DISCHARGE
    ALVAREZ, F
    KOROPECKI, RR
    FAJARDO, F
    JOURNAL OF APPLIED PHYSICS, 1990, 68 (07) : 3786 - 3788
12345