NANOMETER SCALE ETCHING OF MX2-MATERIALS USING SCANNING TUNNELING MICROSCOPY

被引:0
|
作者
HUANG, JL [1 ]
KIM, Y [1 ]
LIEBER, CM [1 ]
机构
[1] COLUMBIA UNIV,DEPT CHEM,NEW YORK,NY 10027
关键词
D O I
暂无
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
引用
收藏
页码:364 / PHYS
相关论文
共 50 条
  • [21] Low energy electron stimulated etching of thin Si-oxide layer in nanometer scale using scanning tunneling microscope
    Li, N
    Yoshinobu, T
    Iwasaki, H
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1999, 38 (3A): : L252 - L254
  • [22] SCANNING TUNNELING MICROSCOPY OF CERAMIC MATERIALS
    BONNELL, DA
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1988, 195 : 644 - INOR
  • [23] NANOMETER SCALE STRUCTURE FABRICATION WITH THE SCANNING TUNNELING MICROSCOPE
    STAUFER, U
    WIESENDANGER, R
    ENG, L
    ROSENTHALER, L
    HIDBER, HR
    GUNTHERODT, HJ
    GARCIA, N
    APPLIED PHYSICS LETTERS, 1987, 51 (04) : 244 - 246
  • [24] Selective-area GaAs growth using nitrogen passivation and scanning-tunneling-microscopy modification on a nanometer scale
    Kasu, M
    Makimoto, T
    Kobayashi, N
    APPLIED PHYSICS LETTERS, 1997, 70 (09) : 1161 - 1163
  • [25] Nanometer-scale current-voltage spectra measurement of resonant tunneling diodes using scanning force microscopy
    Tanimoto, M
    Kanisawa, K
    Shinohara, M
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (2B): : 1154 - 1158
  • [26] Nanometer-scale current-voltage spectra measurement of resonant tunneling diodes using scanning force microscopy
    NTT LSI Lab, Kanagawa, Japan
    Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 2 B (1154-1158):
  • [27] Critical dimension measurement in nanometer scale by using scanning probe microscopy
    Nagase, M.
    Namatsu, H.
    Kurihara, K.
    Makino, T.
    Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers, 1996, 35 (07): : 4166 - 4174
  • [28] Critical dimension measurement in nanometer scale by using scanning probe microscopy
    Nagase, M
    Namatsu, H
    Kurihara, K
    Makino, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1996, 35 (07): : 4166 - 4174
  • [29] SCANNING TUNNELING MICROSCOPY ASSISTED OXIDE SURFACE ETCHING
    SAULYS, D
    RUDD, G
    GARFUNKEL, E
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (03) : 1707 - 1711