ELECTRON INTERFEROMETRY USING A COHERENT BEAM FROM POINT ELECTRON SOURCE

被引:0
|
作者
TONOMURA, A
机构
[1] Advanced Research Laboratory, Hitachi, Ltd., Kokubunji
来源
关键词
D O I
10.1116/1.577054
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Using the electron holography principle, a coherent field-emission electron beam is employed to quantitatively measure to a precision of 277-/100 the phase distribution of an electron wave function transmitted through or reflected from a sample. This technique opens up the possibility of previously impossible high-precision measurements such as the quantitative measurement of magnetic lines of force in a microscopic region, and thickness measurement in atomic dimensions. © 1990, American Vacuum Society. All rights reserved.
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页码:155 / 159
页数:5
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