ALIGNMENT METHOD FOR ROTATING ANALYZER ELLIPSOMETRY

被引：5
|
作者：
KAWABATA, S
机构：
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1987年 / 4卷 / 04期
关键词：
D O I：
10.1364/JOSAA.4.000664
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：664 / 670
页数：7
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