IMPROVED MEASUREMENT METHOD IN ROTATING-ANALYZER ELLIPSOMETRY

被引：16
|
作者：
KAWABATA, S
机构：
来源：
JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1984年 / 1卷 / 07期
关键词：
D O I：
10.1364/JOSAA.1.000706
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：706 / 710
页数：5
相关论文
共 50 条
  • [1] SYSTEMATIC AND RANDOM ERRORS IN ROTATING-ANALYZER ELLIPSOMETRY
    DENIJS, JMM
    VANSILFHOUT, A
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1988, 5 (06): : 773 - 781
  • [2] INFRARED ROTATING-ANALYZER ELLIPSOMETRY - CALIBRATION AND DATA-PROCESSING
    YAKOVLEV, VA
    LI, M
    IRENE, EA
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1993, 10 (03): : 509 - 514
  • [3] CALIBRATION METHOD FOR ROTATING-ANALYZER ELLIPSOMETERS
    DENIJS, JMM
    HOLTSLAG, AHM
    HOEKSTA, A
    VANSILFHOUT, A
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1988, 5 (09): : 1466 - 1471
  • [4] ALIGNMENT METHOD FOR ROTATING ANALYZER ELLIPSOMETRY
    KAWABATA, S
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1987, 4 (04): : 664 - 670
  • [5] Extension of rotating-analyzer ellipsometry to generalized ellipsometry: Determination of the dielectric function tensor from uniaxial TiO2
    Schubert, M
    Rheinlander, B
    Woollam, JA
    Johs, B
    Herzinger, CM
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1996, 13 (04) : 875 - 883
  • [6] OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS
    ASPNES, DE
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) : 639 - 646
  • [7] Calibration method of the specific characteristic of an electronic system of a rotating-analyzer ellipsometer
    Kawabata, S
    Motoki, M
    Yokota, H
    [J]. APPLIED OPTICS, 1997, 36 (10): : 2178 - 2182
  • [8] Optimizing precision of rotating-analyzer and rotating-compensator-ellipsometers
    Aspnes, DE
    [J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2004, 21 (03) : 403 - 410
  • [9] Optimized calibration and measurement procedures in rotating analyzer and rotating polarizer ellipsometry
    Muenz, F.
    Humlicek, J.
    Marsik, P.
    [J]. THIN SOLID FILMS, 2011, 519 (09) : 2703 - 2706
  • [10] Improved full-field rotating analyzer ellipsometry method for ultrathin film characterization
    Meng, Fangfang
    Li, Yan
    Wu, Xuejian
    Chen, Kun
    Wei, Haoyun
    Wang, Xin
    [J]. OPTICAL ENGINEERING, 2015, 54 (08)
12345