CALIBRATION METHOD FOR ROTATING-ANALYZER ELLIPSOMETERS

被引：49

|

作者：

DENIJS, JMM

HOLTSLAG, AHM

HOEKSTA, A

VANSILFHOUT, A

机构：

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1988年 / 5卷 / 09期

关键词：

D O I：

10.1364/JOSAA.5.001466

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：1466 / 1471

页数：6

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