ANALYSIS OF SYSTEMATIC-ERRORS IN ROTATING-ANALYZER ELLIPSOMETERS

被引：43

作者：

AZZAM, RMA ^{[1
]}

BASHARA, NM ^{[1
]}

机构：

[1] UNIV NEBRASKA,ENGN RES CTR,ELECT MAT LAB,LINCOLN,NB 68508

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA | 1974年 / 64卷 / 11期

关键词：

D O I：

10.1364/JOSA.64.001459

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1459 / 1469

页数：11

共 50 条

[1] Random errors behavior for rotating-analyzer ellipsometers
Bortchagovsky, EG
[J]. INTERNATIONAL CONFERENCE ON OPTICAL DIAGNOSIS OF MATERIALS AND DEVICES FOR OPTO-, MICRO-, AND QUANTUM ELECTRONICS 1997, 1998, 3359 : 438 - 448
[2] OPTIMIZING PRECISION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (05) : 639 - 646
[3] CALIBRATION METHOD FOR ROTATING-ANALYZER ELLIPSOMETERS
DENIJS, JMM
HOLTSLAG, AHM
HOEKSTA, A
VANSILFHOUT, A
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1988, 5 (09): : 1466 - 1471
[4] Optimizing precision of rotating-analyzer and rotating-compensator-ellipsometers
Aspnes, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 2004, 21 (03) : 403 - 410
[5] SYSTEMATIC AND RANDOM ERRORS IN ROTATING-ANALYZER ELLIPSOMETRY
DENIJS, JMM
VANSILFHOUT, A
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION, 1988, 5 (06): : 773 - 781
[6] ERRORS IN EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS
RADMAN, DM
CAHAN, BD
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1981, 71 (12) : 1546 - 1546
[7] EFFECTS OF DETECTOR NONLINEARITY ON CALIBRATION AND DATA REDUCTION OF ROTATING-ANALYZER ELLIPSOMETERS
HUNTER, WR
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1976, 66 (02) : 94 - 97
[8] Comparison of the capabilities of rotating-analyzer and rotating-compensator ellipsometers by measurements on a single system
Mori, T
Aspnes, DE
[J]. THIN SOLID FILMS, 2004, 455 : 33 - 38
[9] EFFECTS OF COMPONENT OPTICAL-ACTIVITY IN DATA REDUCTION AND CALIBRATION OF ROTATING-ANALYZER ELLIPSOMETERS
ASPNES, DE
[J]. JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1974, 64 (06) : 812 - 819
[10] THE INFLUENCE OF CELL WINDOW IMPERFECTIONS ON THE CALIBRATION AND MEASURED DATA OF 2 TYPES OF ROTATING-ANALYZER ELLIPSOMETERS
STRAAIJER, A
HANEKAMP, LJ
BOOTSMA, GA
[J]. SURFACE SCIENCE, 1980, 96 (1-3) : 217 - 231

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