ANALYSIS OF SYSTEMATIC-ERRORS IN ROTATING-ANALYZER ELLIPSOMETERS

被引：43

作者：

AZZAM, RMA ^{[1
]}

BASHARA, NM ^{[1
]}

机构：

[1] UNIV NEBRASKA,ENGN RES CTR,ELECT MAT LAB,LINCOLN,NB 68508

来源：

关键词：

D O I：

10.1364/JOSA.64.001459

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

引用

页码：1459 / 1469

页数：11

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