COMPENSATION IN N-TYPE GAAS RESULTING FROM NITROGEN ION-IMPLANTATION

被引：28
|
作者：
DUNCAN, WM
MATTESON, S
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 04期
关键词：
D O I：
10.1063/1.334074
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1059 / 1062
页数：4
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