HOLE TRAPPING AND BREAKDOWN IN THIN SIO2

被引:103
|
作者
CHEN, IC
HOLLAND, S
HU, CM
机构
关键词
D O I
10.1109/EDL.1986.26332
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:164 / 167
页数:4
相关论文
共 50 条
  • [41] Measurements of statistical lag time of breakdown in thin amorphous layers of SiO2
    Vainer, BG
    Kupershtokh, AL
    CONFERENCE RECORD OF THE 1998 IEEE INTERNATIONAL SYMPOSIUM ON ELECTRICAL INSULATION, VOLS 1 AND 2, 1998, : 169 - 172
  • [42] Transient effect of DC stressed dielectric breakdown in thin SiO2 films
    Toriumi, A
    Satake, H
    SOLID-STATE AND INTEGRATED-CIRCUIT TECHNOLOGY, VOLS 1 AND 2, PROCEEDINGS, 2001, : 936 - 941
  • [43] Influence of organic contaminant on breakdown characteristics of MOS capacitors with thin SiO2
    Yoshino, T. (yoshino@sxsys.hiroshima-u.ac.jp), 2001, Japan Society of Applied Physics (40):
  • [44] An extended model for soft breakdown in ultra-thin SiO2 films
    Okhonin, S
    Fazan, P
    Baskin, E
    Guegan, G
    Deleonibus, S
    Martin, F
    ASDAM 2000: THIRD INTERNATIONAL EUROCONFERENCE ON ADVANCED SEMICONDUCTOR DEVICES AND MICROSYSTEMS - CONFERENCE PROCEEDINGS, 2000, : 175 - 178
  • [45] CHARGE BUILD UP AND BREAKDOWN IN THIN SiO2 GATE DIELECTRICS.
    Hillen, M.W.
    De Keersmaecker, R.F.
    Heyns, M.M.
    1983, (EI-19):
  • [46] STUDIES OF BREAKDOWN AND DEFECTS IN THIN SIO2 THERMALLY GROWN ON SI SUBSTRATES
    ABE, H
    KIYOSUMI, F
    YOSHIOKA, K
    INO, M
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (03) : C104 - C104
  • [47] Influence of organic contaminant on breakdown characteristics of MOS capacitors with thin SiO2
    Yoshino, T
    Yokoyama, S
    Suzuki, T
    Fujii, T
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2001, 40 (4B): : 2849 - 2853
  • [48] Characterization of time-dependent dielectric breakdown in intrinsic thin SiO2
    Suehle, JS
    Chaparala, P
    MICROELECTRONICS JOURNAL, 1996, 27 (07) : 657 - 665
  • [49] Impact of conductivity and size of the breakdown spot on the progressive-breakdown of thin SiO2 gate oxides
    Porti, M
    Nafría, M
    Aymerich, X
    MICROELECTRONIC ENGINEERING, 2004, 72 (1-4) : 29 - 33
  • [50] HOLE TRAPPING, SUBSTRATE CURRENTS, AND BREAKDOWN IN THIN SILICON DIOXIDE FILMS
    DIMARIA, DJ
    IEEE ELECTRON DEVICE LETTERS, 1995, 16 (05) : 184 - 186