HOLE TRAPPING AND BREAKDOWN IN THIN SIO2

被引:103
|
作者
CHEN, IC
HOLLAND, S
HU, CM
机构
关键词
D O I
10.1109/EDL.1986.26332
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:164 / 167
页数:4
相关论文
共 50 条
  • [31] HOLE ACCUMULATION IN SIO2/SI3N4/SIO2 CAPACITORS PRIOR TO DIELECTRIC-BREAKDOWN
    SAWACHI, M
    NISHIOKA, Y
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1994, 33 (4A): : 1820 - 1822
  • [32] CHARGE BUILD UP AND BREAKDOWN IN THIN SIO2 GATE DIELECTRICS
    HILLEN, MW
    DEKEERSMAECKER, RF
    HEYNS, MM
    HAYWOOD, SK
    DARAKCHIEV, IS
    IEEE TRANSACTIONS ON ELECTRICAL INSULATION, 1984, 19 (03): : 245 - 249
  • [33] Breakdown measurements of ultra-thin SiO2 at low voltage
    Stathis, JH
    Vayshenker, A
    Varekamp, PR
    Wu, EY
    Montrose, C
    McKenna, J
    DiMaria, DJ
    Han, LK
    Cartier, E
    Wachnik, RA
    Linder, BP
    2000 SYMPOSIUM ON VLSI TECHNOLOGY, DIGEST OF TECHNICAL PAPERS, 2000, : 94 - 95
  • [34] PROCESS DEPENDENCE OF HOLE TRAPPING IN THIN NITRIDED SIO2-FILMS
    SEVERI, M
    DORI, L
    IMPRONTA, M
    GUERRI, S
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (11) : 2447 - 2451
  • [35] HOLE TRANSPORT IN SIO2
    HUGHES, RC
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1977, 124 (08) : C293 - C293
  • [36] DETERMINATION OF CAPTURE CROSS-SECTION OF HOLE-TRAPPING CENTERS IN SIO2
    DEMAAGT, BJ
    VERWEY, JF
    PHILIPS RESEARCH REPORTS, 1973, 28 (03): : 210 - 218
  • [37] HOT-ELECTRON TRAPPING IN THIN LPCVD SIO2 DIELECTRICS.
    Kawamoto, Galen H.
    Magyar, Gregory R.
    Yau, Leopoldo D.
    IEEE Transactions on Electron Devices, 1987, ED-34 (12)
  • [38] CHARGE GENERATION AND BREAKDOWN IN SIO2
    TZOU, JJ
    YAO, CC
    CHEUNG, R
    CHAN, H
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C318 - C318
  • [39] BREAKDOWN OF SIO2 THIN-FILMS GROWN IN DRY O2
    BADILA, M
    PAVELESCU, C
    POPA, O
    THIN SOLID FILMS, 1990, 192 (01) : 1 - 5
  • [40] DIELECTRIC-BREAKDOWN IN THIN-FILMS OF SIO2 USED IN EEPROM
    FAZAN, P
    DUTOIT, M
    MANTHEY, J
    ILEGEMS, M
    MORET, JM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1986, 133 (08) : C318 - C318