ANALYTICAL EXPRESSION FOR THE STANDING WAVE INTENSITY IN PHOTORESIST

被引：49
|
作者：
MACK, CA
机构：
来源：
APPLIED OPTICS | 1986年 / 25卷 / 12期
关键词：
D O I：
10.1364/AO.25.001958
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：1958 / 1961
页数：4
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