共 50 条
- [2] FREE-STANDING PHOTORESIST FILMS FOR MICROLITHOGRAPHY REVIEW OF SCIENTIFIC INSTRUMENTS, 1980, 51 (11): : 1581 - 1583
- [4] A TECHNIQUE FOR ELIMINATING STANDING WAVES AND OTHER INTERFERENCE EFFECTS IN PHOTORESIST IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1980, 27 (03): : 134 - 136