ANALYTICAL EXPRESSION FOR THE STANDING WAVE INTENSITY IN PHOTORESIST

被引：49

|

作者：

MACK, CA

机构：

来源：

APPLIED OPTICS | 1986年 / 25卷 / 12期

关键词：

D O I：

10.1364/AO.25.001958

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

收藏

页码：1958 / 1961

页数：4

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