REACTIVE PLASTICIZERS IN NEGATIVE ELECTRON-BEAM RESISTS

被引：2

作者：

NAMASTE, YMN

OBENDORF, SK

RODRIGUEZ, F

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1988年 / 6卷 / 06期

关键词：

D O I：

10.1116/1.584090

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：2245 / 2248

页数：4

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