SPUTTERING OF ADSORBED LAYERS BY ION-BOMBARDMENT

被引：54
|
作者：
TAGLAUER, E [1 ]
BEITAT, U [1 ]
MARIN, G [1 ]
HEILAND, W [1 ]
机构：
[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,D-8046 GARCHING,FED REP GER
来源：
JOURNAL OF NUCLEAR MATERIALS | 1976年 / 63卷 / 01期
关键词：
D O I：
10.1016/0022-3115(76)90325-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：193 / 198
页数：6
相关论文
共 50 条
  • [1] SPUTTERING POLYMER-FILMS BY ION-BOMBARDMENT
    FILATOV, VN
    SYSOEV, AA
    KOLOTYRKIN, VM
    TUZOV, LS
    SHCHUROV, AN
    HIGH ENERGY CHEMISTRY, 1982, 16 (03) : 218 - 221
  • [2] SPUTTERING OF IRON UNDER MOLECULAR ION-BOMBARDMENT
    GHOSE, D
    BASU, D
    KARMOHAPATRO, SB
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1977, 16 (09) : 1681 - 1682
  • [3] ION-BOMBARDMENT SYNTHESIS OF STABLE NITRIDE LAYERS
    DUCKWORTH, RG
    PLASMA SURFACE ENGINEERING, VOLS 1 AND 2, 1989, : 963 - 970
  • [4] CONTAMINATION LAYERS FORMED BY ARGON ION-BOMBARDMENT
    SHIMIZU, K
    KAWAKATSU, H
    KANAYA, K
    JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (13) : 1453 - 1459
  • [5] FORMATION OF DISORDERED LAYERS IN ION-BOMBARDMENT OF CRYSTALS
    ROMANOV, SI
    SMIRNOV, LS
    SOVIET PHYSICS SEMICONDUCTORS-USSR, 1973, 6 (08): : 1410 - 1411
  • [6] ION-BOMBARDMENT INDUCED DAMAGE IN DIAMOND LAYERS
    GALKIN, VV
    GUSEVA, MI
    KRASNOPE.VV
    MILYUTIN, YV
    SOVIET PHYSICS SOLID STATE,USSR, 1968, 10 (03): : 706 - &
  • [7] MOMENTUM ASYMMETRY AND THE ISOTOPE PUZZLE IN SPUTTERING BY ION-BOMBARDMENT
    SIGMUND, P
    SCKERL, MW
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 82 (02): : 242 - 254
  • [8] SPUTTERING OF ALKALI-HALIDES UNDER ION-BOMBARDMENT
    BIERSACK, JP
    SANTNER, E
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1982, 198 (01): : 29 - 32
  • [9] STRAIN, ION-BOMBARDMENT AND ENERGETIC NEUTRALS IN MAGNETRON SPUTTERING
    WINDOW, B
    MULLER, KH
    THIN SOLID FILMS, 1989, 171 (01) : 183 - 196
  • [10] SPUTTERING OF SILVER BY HEAVY ATOMIC AND MOLECULAR ION-BOMBARDMENT
    THOMPSON, DA
    JOHAR, SS
    NUCLEAR INSTRUMENTS & METHODS, 1980, 170 (1-3): : 281 - 285
12345