SPUTTERING OF ADSORBED LAYERS BY ION-BOMBARDMENT

被引：54
|
作者：
TAGLAUER, E [1 ]
BEITAT, U [1 ]
MARIN, G [1 ]
HEILAND, W [1 ]
机构：
[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,D-8046 GARCHING,FED REP GER
来源：
JOURNAL OF NUCLEAR MATERIALS | 1976年 / 63卷 / 01期
关键词：
D O I：
10.1016/0022-3115(76)90325-1
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：193 / 198
页数：6
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