CONTAMINATION LAYERS FORMED BY ARGON ION-BOMBARDMENT

被引:17
|
作者
SHIMIZU, K [1 ]
KAWAKATSU, H [1 ]
KANAYA, K [1 ]
机构
[1] KOGAKUIN UNIV,SHINJUKU,TOKYO,JAPAN
关键词
D O I
10.1088/0022-3727/8/13/006
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:1453 / 1459
页数:7
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