ION-BOMBARDMENT SYNTHESIS OF STABLE NITRIDE LAYERS

被引：0
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作者：
DUCKWORTH, RG
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来源：
PLASMA SURFACE ENGINEERING, VOLS 1 AND 2 | 1989年
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T [工业技术];
学科分类号：
08 ;
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页码：963 / 970
页数：8
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