SYNTHESIS OF CARBON NANOSHEETS AND CARBON NANOPARTICLES BY RF-PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION

In this study, thin sheets like carbon nanostructures and carbon nanoparticles have been effectively synthesized with CH4 and Ar as precursors at low temperature (< 400. C) by inductively coupled radio frequency plasma enhanced chemical vapor deposition on silicon and glass substrates. The surface morphology and chemical composition were studied by atomic force microscopy (AFM), scanning electron microscopy ( SEM) with energy dispersive spectroscopy (EDS), and X- ray diffraction ( XRD) analysis. AFM studies show that the nanoparticles roughly about 70 to 80 nm in diameter surrounded by nanosheets. Nanosheets are about 100 nm in thickness, which attain approximately 1.75 ae m lengths. EDS results revealed that the atomic percentage of carbon in the particle like structure is more than that in the nanosheet like structures.