Synthesis of carbon nanosheets by inductively coupled radio-frequency plasma enhanced chemical vapor deposition

An ultrathin sheet-like carbon nanostructure, carbon nanosheet, has been effectively synthesized with CH4 diluted in H-2 by an inductively coupled radio-frequency plasma enhanced chemical vapor deposition. Nanosheets were obtained without catalyst over a wide range of deposition conditions and on a variety of substrates, including metals, semiconductors and insulators. Scanning electron microscopy shows that the sheet-like structures stand on edge on the substrate and have corrugated surfaces. The sheets are 1 nm or less in thickness and have a defective graphite structure. Raman spectra show typical carbon features with D and G peaks at 1350 and 1580 cm(-1), respectively. The intensity ratio of these two peaks, I(D)/I(G), increases with methane concentration or substrate temperature, indicating that the crystallinity of the nanosheets decreases. Infrared and thermal desorption spectroscopies reveal hydrogen incorporation into the carbon nanosheets. (C) 2004 Elsevier Ltd. All rights reserved.