SPECTRAL FEATURES OF A HF DISCHARGE PLASMA IN ETCHING ALUMINUM

被引：0
|
作者：
GUSEV, VV
DOLGOPOLOV, VM
SLOVETSKII, DI
SHELYKHMANOV, EF
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来源：
HIGH TEMPERATURE | 1983年 / 21卷 / 01期
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O59 [应用物理学];
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摘要：
15
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页码：19 / 25
页数：7
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