DIELECTRIC-CONSTANT AND DISSIPATION FACTOR IN LTCVD SIO2-FILMS

被引：0
|
作者：
COBIANU, C
PAVELESCU, C
CATUNEANU, VM
机构：
[1] MICROELECTR,R-72996 BUCHAREST,ROMANIA
[2] POLYTECH INST BUCHAREST,R-76206 BUCHAREST,ROMANIA
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C105 / C106
页数：2
相关论文
共 50 条
  • [31] NOZZLE BEAM DEPOSITION OF SIO2-FILMS
    WONG, J
    LU, TM
    MEHTA, S
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1985, 3 (01): : 453 - 456
  • [32] ON THE BREAKDOWN STATISTICS OF THIN SIO2-FILMS
    SUNE, J
    PLACENCIA, I
    FARRES, E
    BARNIOL, N
    AYMERICH, X
    PROCEEDINGS OF THE 3RD INTERNATIONAL CONFERENCE ON CONDUCTION AND BREAKDOWN IN SOLID DIELECTRICS, 1989, : 364 - 368
  • [33] THERMAL SIO2-FILMS - A STUDY BY HRTEM
    SRIVASTAVA, JK
    WAGNER, JB
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1984, 131 (06) : C196 - C196
  • [34] DIELECTRIC-CONSTANT OF SOLID H2
    HAASE, D
    MEYER, H
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1975, 20 (04): : 672 - 672
  • [35] CORRECTED CALCULATION OF STATIC DIELECTRIC-CONSTANT OF BARIUM STEARATE FILMS
    KHANNA, U
    SRIVASTAVA, VK
    THIN FILMS, 1972, 2 (02): : 167 - 168
  • [36] 2 METHODS FOR THE MEASUREMENT OF SUBSTRATE DIELECTRIC-CONSTANT
    DAS, NK
    VODA, SM
    POZAR, DM
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1987, 35 (07) : 636 - 642
  • [37] THE DEFECT STRUCTURE OF VITREOUS SIO2-FILMS ON SILICON .3. THE ROLE OF DEFECT STRUCTURE IN THE GROWTH OF SIO2-FILMS
    REVESZ, AG
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 58 (01): : 107 - 113
  • [38] NONLINEAR VISCOELASTIC DILATION OF SIO2-FILMS
    RAFFERTY, CS
    LANDSBERGER, LM
    DUTTON, RW
    TILLER, WA
    APPLIED PHYSICS LETTERS, 1989, 54 (02) : 151 - 152
  • [39] RAPID THERMAL NITRIDATION OF SIO2-FILMS
    ELFERINK, JBO
    HABRAKEN, FHPM
    VANDERWEG, WF
    DOOMS, E
    HEYNS, M
    DEKEERSMAECKER, R
    APPLIED SURFACE SCIENCE, 1989, 39 (1-4) : 219 - 226
  • [40] SCATTERING OF POLARITONS BY FLUCTUATIONS OF THE DIELECTRIC-CONSTANT IN THIN-FILMS
    ARSEEV, PI
    JETP LETTERS, 1987, 45 (03) : 163 - 165
12345