DIELECTRIC-CONSTANT AND DISSIPATION FACTOR IN LTCVD SIO2-FILMS

被引：0

|

作者：

COBIANU, C

PAVELESCU, C

CATUNEANU, VM

机构：

[1] MICROELECTR,R-72996 BUCHAREST,ROMANIA

[2] POLYTECH INST BUCHAREST,R-76206 BUCHAREST,ROMANIA

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1986年 / 133卷 / 03期

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D O I：

暂无

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

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页码：C105 / C106

页数：2

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