THE DEFECT STRUCTURE OF VITREOUS SIO2-FILMS ON SILICON .3. THE ROLE OF DEFECT STRUCTURE IN THE GROWTH OF SIO2-FILMS

被引：21

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作者：

REVESZ, AG

机构：

来源：

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH | 1980年 / 58卷 / 01期

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D O I：

10.1002/pssa.2210580113

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T [工业技术];

学科分类号：

08 ;

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页码：107 / 113

页数：7

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