FORMATION OF CONDUCTING LAYERS BY IRRADIATION OF THE SURFACE OF SILICON WITH A LASER PLASMA FORMED BY THE EROSION OF BORON AND SUBSEQUENT ANNEALING

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作者：
KALYAGIN, MA
STRIKOVSKII, MD
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SOVIET PHYSICS SEMICONDUCTORS-USSR | 1989年 / 23卷 / 06期
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O469 [凝聚态物理学];
学科分类号：
070205 ;
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页码：604 / 606
页数：3
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